John T. Grant

2 DAYS: Monday 16 & Tuesday 17 September 2019


The courses are being taught by John T. Grant, who has over 40 years experience in surface analysis, and who has been teaching such courses for many years. He had been a Distinguished Research Scientist at the University of Dayton for over 30 years. He is now a consultant in surface science. He is co-editor of the book: Surface Analysis by Auger and X-ray Photoelectron Spectroscopy.

Who Should Attend?

Scientists, engineers, technicians, and students, who would like a detailed understanding of the principles and uses of XPS/ESCA for surface analysis and depth profiling.

Description and Objectives

XPS is used to determine the atoms present at a surface and their concentrations, chemistry, and lateral and depth distributions. This course is designed for scientists, engineers, technicians, and students, who would like a detailed understanding of the principles and uses of XPS/ESCA for surface analysis and depth profiling. Topics include the principles of XPS, instrumentation, qualitative analysis, quantitative analysis, artifacts, data acquisition and processing, imaging, and depth profiling. If you are planning to purchase equipment, this course will also aid in your selection of equipment.

Course Materials

Printed copy of all slides


Day 1: 16 September 2019; 09:00-12:30 and 13:30-17:00

Introduction - terminology, surfaces, types of surfaces.

The principles of XPS - production of photoelectrons, peak labeling, electronic configuration of atoms, atoms, molecules, solids, binding energy, spectra, Auger process, valence spectra, surface sensitivity, information depth, hard x-rays, sample handling, identification of elements, backgrounds, spin-orbit splitting, chemical shift, plasmons, multiplet splitting, shake-up.

Instrumentation - dual anode, Bremsstrahlung, monochromatic source, synchrotrons, electron energy analyzers, spectrum acquisition, energy resolution, peak widths, lineshapes, electron detectors, pulse counting, position sensitive detectors, small area analysis, area location, imaging XPS, methods, equipment and examples, vacuum system, samples, energy scale calibration.


Day 2: 17 September 2019; 09:00-12:30 and 13:30-17:00

Qualitative analysis - identification of elements, changing x-ray sources, charging, relaxation effects, Auger parameter.

Quantitative analysis - sensitivity factors, ionization cross section, asymmetry parameter, analyzer transmission, reference spectra, intensities, background subtraction, detection limit, effect of thin overlayers.

Artifacts - x-ray damage, charging, methods for charge control, ghost peaks.

Data acquisition and processing - processing data, background subtraction, satellite subtraction, peak area, lineshapes, curve fitting, deconvolution.

Depth profiling - non-destructive and destructive methods, angle resolved XPS, diffraction, elastic scattering, thickogram, inelastic loss method, sputtering, depth calibration.

Applications - some further examples of applications of XPS.

Instrument selection and summary - factors to consider, general summary.


Registration fees

Type of registration Profile Fee
Short course only Regular 600 €
Student * 400 €
Short course fee for conference participants Regular 450 €
Student * 290 €
Coffee, soft drinks and a lunch in the IFW-Cafeteria are included.
Minimum Number of participants: 10

* A copy of the Student ID will be required to validate the registration.




You can review the conference with some pictures here.

Program Download

Download the finale program as PDF file (8MB)



With kind support of



Agency / Contact

Intercom Dresden GmbH
Intercom Dresden GmbH
Sylvia Neumann
Zellescher Weg 3
01069 Dresden, Germany
+49 351 32017320
+49 351 32017333

Technical support

EventClass GmbH | it - solutions for the event management / it - lösungen für das veranstaltungsmanagement
EventClass GmbH
it - solutions for the event management